| 摘要 |
The invention is a spatial light modulator (100) having selectively reflective deflectable micro mirror array (103) plates (202) fabricated from a first substrate (105). On another substrate there is addressing and control circuitry (106) for the micro mirror array (103), which allows the control circuitry (106) to control a voltage applied to selected electrodes (126) associated with the micro mirror plates (204). Typically, the control circuitry (106) includes a display control (108), line memory buffers (110), a pulse width modulation array (112), and inputs for video signals (120) and graphic signals (122). The mirror array substrate (105) further has a spacer support frame (210) and hinges (206), wherein when an electrostatic force is applied to the micro mirror array plates (204), the hinges attached thereto allow the mirror plates (204) to rotate relative to the spacer support frame (210). This rotation produces the angular deflection for the reflecting light in a selected direction. The first and second substrate are bonded together.
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