Method of processing a workpiece,申请号GB20030027785-传众专利搜索

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发明名称	Method of processing a workpiece
摘要
申请公布号	GB0327785(D0)	申请公布日期	2003.12.31
申请号	GB20030027785	申请日期	2003.11.29
申请人	TRIKON TECHNOLOGIES LIMITED	发明人
分类号	H01L21/3065;H01L21/00;H01L21/02;H01L21/31;H01L21/683	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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