发明名称 VARIABLE CAPACITANCE MEASURING DEVICE
摘要 A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. A glass-ceramic material may be used as an insulator and be chemically bond to the surfaces of the metallic materials to provide a hermetic seal and eliminate the need for a separate glass seal or grooves within the electrode assembly. Additionally, a single-piece electrode assembly can be used instead of a separate electrode assembly (for the electrical feedthrough) and electrode. Embodiments also include processes for using and forming the devices.
申请公布号 WO2004001339(A2) 申请公布日期 2003.12.31
申请号 WO2003US19754 申请日期 2003.06.23
申请人 MYKROLIS CORPORATION;MEI, HAI 发明人 MEI, HAI
分类号 G01L9/12;G01D;G01L9/00;G01L19/04;G01L19/06 主分类号 G01L9/12
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