发明名称 |
MOLD TOOL METHOD OF MANUFACTURING A MOLD TOOL AND STORAGE MEDIUM FORMED BY USE OF THE MOLD TOOL |
摘要 |
<p>Method for manufacturing a mold tool (1), devised for forming a structured nanoscale pattern on an object (24) and having a layer (16) which is anti-adhesive with regard to the object (24). A stamp blank (2) is provided with a structured pattern (4) on a surface (8). The patterned surface (8) is coated with a layer (6)of a metal, which has a stable oxidation number and can form a mechanically stable oxide film. The metal layer (6) is oxidized for forming of an oxide film (10). The oxide film (10) is exposed to a reagent comprising molecule chains (18), each of which has a linkage group (20) which bonds to the oxide film (10) by chemical bonding, wherein the molecule chains (18) either at the outset comprise at least a group (22) comprising fluorine, or in a subsequent step is provided with at least one such group (22).</p> |
申请公布号 |
WO2004000567(A1) |
申请公布日期 |
2003.12.31 |
申请号 |
WO2003SE01004 |
申请日期 |
2003.06.16 |
申请人 |
OBDUCAT AB;LING, TORBJOERN;MONTELIUS, LARS;KEIL, MATTHIAS;BECK, MARC |
发明人 |
LING, TORBJOERN;MONTELIUS, LARS;KEIL, MATTHIAS;BECK, MARC |
分类号 |
B29C33/42;B29C33/56;B41M;B41M1/06;B81C1/00;G03F7/00;G11B5/855;H01L21/31;H01L21/469;(IPC1-7):B41M1/06 |
主分类号 |
B29C33/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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