发明名称 SOFT SUPPORT TO REDUCE DEFORMATION OF VERTICALLY MOUNTED LENS OR MIRROR
摘要 <p>A soft support for vertically mounting an optical element such as a lens or a mirror has one or more soft mounts each supporting the optical element from below at a peripheral position either vertically or radially and a plurality of position defining constraints that are more rigid that the soft mounts, each applying a peripheral tangential force on the optical element.</p>
申请公布号 WO2004001479(A1) 申请公布日期 2003.12.31
申请号 WO2003US19720 申请日期 2003.06.19
申请人 NIKON CORPORATION 发明人 WATSON, DOUGLAS, C.
分类号 G02B7/02;G02B7/182;G03F7/20;(IPC1-7):G02B7/02;G02B7/18 主分类号 G02B7/02
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