JIG APPARATUS FOR MEASURING DIAMETER OF CENTER OF ROBOT PADDLE

摘要

PURPOSE: A jig apparatus for measuring the diameter of the center of a robot paddle is provided to prevent a semiconductor wafer from being broken into pieces by precisely centering the semiconductor wafer mounted on the robot paddle and a cassette plate. CONSTITUTION: The jig apparatus(10) is of a rectangular type. A through hole(12) is formed in the jig apparatus so that the robot paddle can be inserted into the lower center of the jig apparatus. Protrusion pins(14) of a pin type are formed at both sides of the lower part of the jig apparatus. Pin holes are formed at both sides of the upper part of the cassette plate on which the semiconductor wafer is mounted, so as to be inserted into the protrusion pins.