WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS

摘要

Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of Formula (I) and (II), where each of X<1> and Y is individually selected from the group consisting of electron withdrawing groups; R<2> is selected from the group consisting of alkyls and aryls; and R<3> is selected from the group consisting of hydrogen and alkyls. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.