| 发明名称 |
REFLECTIVE SPATIAL LIGHT MODULATOR |
| 摘要 |
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro-mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio. |
| 申请公布号 |
WO2004001487(A2) |
申请公布日期 |
2003.12.31 |
| 申请号 |
WO2003US17299 |
申请日期 |
2003.05.30 |
| 申请人 |
XHP MICROSYSTEMS, INC. |
发明人 |
PAN, SHAOHER, X.;CHEN, DONGMIN;YANG, XIAO;ZHANG, SHOUCHENG |
| 分类号 |
G02F1/00;G02B26/08;G02B26/10 |
主分类号 |
G02F1/00 |
| 代理机构 |
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