MICRO-GRIPPER USING ELECTROSTATIC FORCE

摘要

PURPOSE: A micro-gripper using an electrostatic force is provided to reduce the size and manufacturing costs of the micro-gripper. CONSTITUTION: A micro-gripper(100) using an electrostatic force is composed of outer and inner electrodes(115,116) mounted at a board(105) and fixing an object by electrostatic force, at least one elastic support unit(221) connected to the board and supporting the inner electrode, and a micro-actuator(225) formed at the board. The micro-actuator moves the inner electrode away from the object, and puts the object on the desired position.