APPARATUS FOR ADJUSTING THE GAP BETWEEN SUSCEPTOR AND DISPERSION HEAD

摘要

PURPOSE: An apparatus for adjusting the gap between a susceptor and a dispersion head is provided to improve the yield of a wafer. CONSTITUTION: An apparatus(40) for adjusting the gap between a susceptor and a dispersion head is provided with a fixing plate(42) having a predetermined size and thickness corresponding to the size of the susceptor, a support part(41) for fixing and supporting one end portion of the fixing plate, and a driving plate(43) capable of being moved along the shaft of the support part, attached to the fixing plate. At this time, the driving plate has the same size as the fixing plate. The gap control apparatus further includes a plurality of inserting plates(44) inserted into a predetermined space formed between the fixing plate and the driving plate for sealing the predetermined space.