ACTUATOR WITH ORGANIC MEMBRANE AND FABRICATING METHOD THEREOF

摘要

PURPOSE: An actuator with an organic film membrane is provided to simplify a fabricating process by eliminating the necessity of a wet etch process performed on the backside of a substrate, and to guarantee mechanical intensity of a wafer and decrease process time by reducing an etched quantity. CONSTITUTION: A cavity part(11) of a predetermined volume is formed in the center of the upper surface of the substrate(10), including a bottom part. The organic film membrane(20) closes the upper portion of the cavity part, attached to the upper surface of the substrate. A fixed electrode(40) is formed in the bottom of the cavity part. A driving electrode(30) is formed in the organic film membrane.