发明名称 |
LAYER ASSEMBLY AND METHOD FOR PRODUCING A LAYER ASSEMBLY |
摘要 |
The invention relates to a layer assembly and to a method for producing a layer assembly. This layer assembly comprises a layer that is placed on a substrate. Said layer comprises a first partial region, which is made of a decomposable material, and an adjacent second partial region with a useful structure made of a non-decomposable material. The layer assembly also has a top layer which is arranged on the layer made of a decomposable material and the useful structure. The layer assembly is designed so that the decomposable material can be removed from the layer assembly. |
申请公布号 |
WO2004001842(A2) |
申请公布日期 |
2003.12.31 |
申请号 |
WO2003DE01827 |
申请日期 |
2003.06.03 |
申请人 |
INFINEON TECHNOLOGIES AG;BARTH, HANS-JOACHIM;SEZI, RECAI |
发明人 |
BARTH, HANS-JOACHIM;SEZI, RECAI |
分类号 |
H01L21/312;H01L21/768;H01L23/522 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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