发明名称 LAYER ASSEMBLY AND METHOD FOR PRODUCING A LAYER ASSEMBLY
摘要 The invention relates to a layer assembly and to a method for producing a layer assembly. This layer assembly comprises a layer that is placed on a substrate. Said layer comprises a first partial region, which is made of a decomposable material, and an adjacent second partial region with a useful structure made of a non-decomposable material. The layer assembly also has a top layer which is arranged on the layer made of a decomposable material and the useful structure. The layer assembly is designed so that the decomposable material can be removed from the layer assembly.
申请公布号 WO2004001842(A2) 申请公布日期 2003.12.31
申请号 WO2003DE01827 申请日期 2003.06.03
申请人 INFINEON TECHNOLOGIES AG;BARTH, HANS-JOACHIM;SEZI, RECAI 发明人 BARTH, HANS-JOACHIM;SEZI, RECAI
分类号 H01L21/312;H01L21/768;H01L23/522 主分类号 H01L21/312
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