发明名称 TEMPERATURE REGULATOR FOR USE WITH PRESSURE SENSOR
摘要 <p>A system and method for regulating the temperature of a sensor to reduce temperature gradients that form within the sensor. In one embodiment, the temperature gradients are reduced utilizing a temperature regulator with two controlled zones that surround a variable capacitance sensor. Measurements are made for the ambient temperature of at least one of the two temperature controlled zones, and the temperature differential between the two temperature controlled zones. The temperature regulator then adjusts the temperature of the two controlled zones based upon this differential in order to minimize the existing temperature gradient.</p>
申请公布号 AU2003253640(A1) 申请公布日期 2003.12.31
申请号 AU20030253640 申请日期 2003.06.12
申请人 MYKROLIS CORPORATION 发明人 SHIYUAN CHENG;DARYL, L. BUCHANAN;DWIGHT, S. LARSON;MICHAEL, W. FORTNER
分类号 G01L19/06;G01K1/20;G01K3/06;G01L9/00;G01L9/12;G01L19/04;(IPC1-7):B60H1/00;F24F3/00 主分类号 G01L19/06
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