ION SOURCE FOR ION INJECTION SYSTEM

摘要

PURPOSE: An ion source is provided to achieve improved efficiency of ionization and reduce a gas consumption by enhancing the reaction gas supply structure. CONSTITUTION: An ion source(110) comprises an arc chamber(112) supplied with gas through a gas line; a first electrode installed in the arc chamber; and a second electrode opposed to the first electrode. The arc chamber has an injection nozzle(120) connected to the gas line. The injection nozzle improves speed of gas injection and permits gas to be uniformly injected all over the arc chamber.