ROTARY TYPE MASS-PRODUCING CVD FILM FORMING DEVICE AND METOD OF FORMING CVD FILM ON SURFACE IN PLASTIC CONTEINER
摘要
<p>A rotary type, mass-producing CVD film forming device having high-frequency power supplies and matching boxes fewer than film-forming chambers. The device is characterized by comprising a plurality of column-shaped film-forming chambers each storing a plastic container and provided circularly on a rotary support at equal intervals, a material gas introducing means for introducing a material gal into a container stored in each film-forming chamber via a material gas supply pipe doubling as an internal electrode, and a high-frequency wave supply means for supplying high-frequency wave to an external electrode doubling as part of each film-forming chamber.</p>
