| 发明名称 |
DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS |
| 摘要 |
<p>A device is suggested which includes a carrier (1) for receiving the disk-shaped object (10), a liquid supply device (17) for applying liquid onto a disk-shaped object (10) located on the carrier (1), and a liquid catch ring (2), which is positioned essentially coaxially around the carrier (1) and is rotatable around the axis of the liquid catch ring (2).</p> |
| 申请公布号 |
WO2004001812(A1) |
申请公布日期 |
2003.12.31 |
| 申请号 |
WO2003EP06441 |
申请日期 |
2003.06.18 |
| 申请人 |
SEZ AG;HOHENWARTER, KARL-HEINZ |
发明人 |
HOHENWARTER, KARL-HEINZ |
| 分类号 |
B08B3/02;G11B5/84;G11B7/26;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
B08B3/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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