DUAL WAVELENGTH PROJECTIVE MOIRE BASED SHAPE MEASURING APPARATUS, AND METHOD FOR AUTOMATICAL CALIBRATION FOR MULTIHEAD SYSTEM USING REGISTRATION

摘要

PURPOSE: A dual wavelength projective moire based shape measuring apparatus, and a method for automatical calibration for a multihead system using registration are provided to freely control resolving power by using virtual grids using a computer. CONSTITUTION: A virtual grid forming unit makes virtual grids having predetermined virtual grid gaps. A projecting unit projects the virtual grids to an object(10) to be measured. A video input unit obtains video data of transformed grids on the object according to moire generated by unevenness of a surface of the object. A digital data converter converts the video data into digital data. A video data operating unit receives the digital data of the transformed grids, and forms shape data of the object through operation of the received digital data with data of reference grids which are straight line grids having the same pitch as the virtual grids.