ENHANCED STRUCTURE AND METHOD FOR BURIED LOCAL INTERCONNECTS,申请号AU20020306174-传众专利搜索

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发明名称	ENHANCED STRUCTURE AND METHOD FOR BURIED LOCAL INTERCONNECTS
摘要
申请公布号	AU2002306174(A1)	申请公布日期	2003.12.31
申请号	AU20020306174	申请日期	2002.06.14
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	RAMACHANDRA DIVAKARUNI;OLEG GLUSCHENKOV;JACK, A. MANDELMAN;CARL, J. RADENS;ROBERT, C. WONG
分类号	H01L29/41;H01L21/3205;H01L21/74;H01L21/76;H01L21/762;H01L21/768;H01L21/82;H01L21/8234;H01L21/84;H01L23/52;H01L23/535;H01L27/08;H01L27/088;H01L27/12;H01L29/40;H01L29/423;H01L29/78;H01L29/786;(IPC1-7):H01L29/40	主分类号	H01L29/41
代理机构		代理人
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