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发明名称
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS
摘要
申请公布号
AU2003243546(A1)
申请公布日期
2003.12.31
申请号
AU20030243546
申请日期
2003.06.13
申请人
COVENTOR, INCORPORATED
发明人
HECTOR, J. DE LOS SANTOS
分类号
B81B3/00;H01G5/18;H01L27/108;H01L27/14;H01L29/76
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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