| 摘要 |
PURPOSE: A device for sensing a substrate in a cassette is provided to sense the existence of a substrate by changing positions of sensor brackets in every direction, thereby preventing the malfunction of sensors and reducing the sensor exchanging frequency. CONSTITUTION: A device for sensing a substrate in a cassette includes a tower type supporting block(10) mounted vertically, and a plurality of movement lines(40) disposed vertically to a surface of the supporting block in parallel to each other with a predetermined inclination angle. A plurality of plate type sensor brackets(20) are movably mounted along the movement lines. Optical sensor(30) is fixed to outer upper parts of the respective sensor brackets to sense the substrates. |
