METHOD FOR CLEANING CHAMBER OF DEPOSITION APPARATUS FOR ORGANIC EL DEVICE PRODUCTION

摘要

Recovering and reutilizing compounds, such as Alq3, accumulated on the internal surface of chamber in the production of organic EL elements and disposed of to thereby reduce production cost. The internal surface of chamb er or internal members of chamber to which Alq3 and other compounds have stuck are cleaned with a fluorinated alcohol, such as 2,2,3,3,4,4,5,5- octafluoropentanol, thereby recovering Alq3.