Double arm substrate transport unit

摘要

A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, includes a robotic arm formed of a first forearm supported by the tip part of a base arm so as to be freely rotatable. A first end effector on which a work piece is placed is supported by the tip part of the first forearm so as to be freely rotatable. A second forearm is supported by the tip part of the base arm so as to be freely rotatable is attached above the first forearm so as to overlap the first forearm. A second end effector on which a work piece is placed is supported by the tip part of the second forearm so as to be freely rotatable.