发明名称 Semiconductor structures
摘要 A method of implanting dopants into a semiconductor structure wherein a lateral periphery of a photoresist mask is shifted after implanting a first dopant and prior to implanting a second dopant. The invention also includes semiconductor structures having two doped regions of a semiconductive material separated by a region less heavily doped than the doped regions.
申请公布号 US6670681(B2) 申请公布日期 2003.12.30
申请号 US20030341925 申请日期 2003.01.13
申请人 MICRON TECHNOLOGY, INC. 发明人 TRIVEDI JIGISH D.
分类号 H01L21/266;H01L21/8238;(IPC1-7):H01L29/76 主分类号 H01L21/266
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