Method and apparatus for correcting multipole aberrations of an electron beam in an EBT scanner

摘要

A method and apparatus are disclosed for reducing variation in a spot size of an electron beam at a target due to multipole aberrations in an electron beam tomography (EBT) scanner. A magnitude of a DC voltage applied to a positive ion electrode (PIE) within the EBT scanner is adjusted and an orientation of a non-circular aperture of the PIE is aligned with respect to the electron beam. A profile of the spot size is monitored while adjusting the magnitude of the DC voltage and while aligning the orientation of the non-circular aperture of the PIE until the variation in the spot size is sufficiently reduced.