| 发明名称 |
Magnetic field furnace and a method of using the same to manufacture semiconductor substrates |
| 摘要 |
An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber and a growth hardware assembly housed within the chamber. A magnetic field system produces a vertical magnetic field within the chamber.
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| 申请公布号 |
US6669776(B2) |
申请公布日期 |
2003.12.30 |
| 申请号 |
US20020211627 |
申请日期 |
2002.08.02 |
| 申请人 |
EBARA SOLAR, INC. |
发明人 |
GLAVISH HILTON F.;ISOZAKI HIDEYUKI;MAISHIGI KEIJI;FUJITA KENTARO |
| 分类号 |
C30B29/06;C30B15/00;C30B15/30;C30B29/02;C30B29/64;C30B30/04;(IPC1-7):C30B15/00 |
主分类号 |
C30B29/06 |
| 代理机构 |
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