发明名称 Optical circuit in which fabrication is easy
摘要 In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.
申请公布号 US6670208(B2) 申请公布日期 2003.12.30
申请号 US20010796257 申请日期 2001.02.28
申请人 NEC CORPORATION 发明人 ODA MIKIO;SOEJIMA KOJI;KITAJO SAKAE
分类号 G02B6/12;G02B6/122;G02B6/42;(IPC1-7):H01L21/00 主分类号 G02B6/12
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