发明名称 |
Optical circuit in which fabrication is easy |
摘要 |
In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.
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申请公布号 |
US6670208(B2) |
申请公布日期 |
2003.12.30 |
申请号 |
US20010796257 |
申请日期 |
2001.02.28 |
申请人 |
NEC CORPORATION |
发明人 |
ODA MIKIO;SOEJIMA KOJI;KITAJO SAKAE |
分类号 |
G02B6/12;G02B6/122;G02B6/42;(IPC1-7):H01L21/00 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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