Separation of C2F6 from CF4 by adsorption on activated carbon

摘要

This invention relates to an improvement in a process for removing C2F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the process comprises the steps:contacting the CF4 containing gas, containing C2F6 impurity, with an activated carbon having a CCl4 activity from 43 to 55 in an adsorption bed to effect adsorption of the C2F6 impurity; and,recovering purified CF4 product in the effluent from the adsorbent bed.