发明名称 Method for manufacturing semiconductor laser having recombination layer stripes in current blocking structure
摘要 In the pattern of a selective growth mask for directly forming an active layer, open stripes for growing recombination layers to be inserted into a current blocking are formed in addition to an open stripe for growing the active layer. By this mask pattern, the position and band gap of the recombination layers are controlled. Whereby, at an arbitrary position in the vicinity of the active layer, recombination layers having an arbitrary band gap can be batch formed together with the active layer. Thus, a semiconductor laser element with an excellent high-temperature high-output characteristic can be fabricated with good uniformity and reproducibility.
申请公布号 US6670203(B2) 申请公布日期 2003.12.30
申请号 US20010994703 申请日期 2001.11.28
申请人 NEC CORPORATION 发明人 FURUSHIMA YUJI
分类号 H01S5/00;B82Y20/00;H01L33/00;H01S5/22;H01S5/227;(IPC1-7):H01L21/20 主分类号 H01S5/00
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