发明名称 |
Apparatus and method for thermal isolation of thermal mass flow sensor |
摘要 |
A thermal mass flow controller includes a sensor assembly and mass flow controller housing. A thermal ground limits the conductive thermal path between the mass flow controller housing and the sensor assembly and, due to the limited cross-section of the thermal ground, substantially eliminates externally imposed thermal gradients within the sensor assembly.
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申请公布号 |
US6668642(B2) |
申请公布日期 |
2003.12.30 |
申请号 |
US20010032273 |
申请日期 |
2001.12.21 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
AMBROSINA JESSE;SUZUKI ISAO |
分类号 |
G01F1/00;G01F1/684;G01F5/00;G05D7/06;(IPC1-7):G01F1/68 |
主分类号 |
G01F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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