发明名称 |
Methods of microstructuring ferroelectric materials |
摘要 |
A method of micro-structuring a surface of a sample of ferroelectric material, the method comprising: (a) taking a sample of ferroelectric material having a -z face which is to be etched; (b) illuminating the -z face with ultraviolet light to define illuminated and unilluminated parts of the surface; and (c) immersing the -z face in an etchant to selectively remove the unilluminated parts of the -z face at a greater rate than the illuminated parts. The method can be carried out using pulsed ultraviolet light to etch lithium niobate crystals cut for etching on the -z face, and may further be combined with ablation to produce multi-level surface structures.
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申请公布号 |
US6670280(B2) |
申请公布日期 |
2003.12.30 |
申请号 |
US20020170338 |
申请日期 |
2002.06.14 |
申请人 |
UNIVERSITY OF SOUTHAMPTON |
发明人 |
EASON ROBERT WILLIAM;BROWN PAUL;MAILIS SAKELLARIS |
分类号 |
C30B33/00;(IPC1-7):H01L21/302;G03C5/00 |
主分类号 |
C30B33/00 |
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