| 摘要 |
A control signal generator transmits a first signal to a movable electrode and a fixed electrode to detect a change in a capacitance formed between the movable electrode and the fixed electrode during a normal physical quantity detection timing interval. Also, the control signal generator transmits a second signal to the movable electrode and the fixed electrode instead of the first signal to move the movable electrode for diagnosing a malfunction of each of a plurality of physical quantity detection portions during a self diagnosis timing interval. The control signal generator transmits the second signal to the movable electrode and the fixed electrode of each physical quantity detection portion during a different timing intervals.
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