发明名称 Method for fabricating an ESD device
摘要 The present invention provides a method for fabricating an ESD device. First, a substrate undergoes first implantation to form a first first-type well comprising an electrostatic discharge region. Next, second implantation is performed on the substrate and the electrostatic discharge region to form a second first-type well and an ESD device. Finally, gates, sources, and drains are formed to complete the process.
申请公布号 US6670245(B2) 申请公布日期 2003.12.30
申请号 US20010974797 申请日期 2001.10.12
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 YU TA-LEE
分类号 H01L21/8234;H01L27/02;(IPC1-7):H01L21/823 主分类号 H01L21/8234
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