发明名称 |
Electrostatic zipper actuator optical beam switching system and method of operation |
摘要 |
A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.
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申请公布号 |
US6671078(B2) |
申请公布日期 |
2003.12.30 |
申请号 |
US20010863654 |
申请日期 |
2001.05.23 |
申请人 |
AXSUN TECHNOLOGIES, INC. |
发明人 |
FLANDERS DALE C.;SCHMIDT MARTIN A. |
分类号 |
B81B3/00;B81B5/00;G02B6/35;(IPC1-7):G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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