| 摘要 |
A scanning probe microscopy tool with innovative sensing system is provided by the present disclosure. This scanning probe microscopy tool includes a special cantilever with partially reflective surfaces that makes the scanning probe tool more capable. This scanning probe microscopy tool also includes at least one light source that illuminates the cantilever with a light beam that need not be focused and may be collimated. In addition, the light beam may be larger than the size of the oscillator and may illuminate more than one cantilever. This scanning probe microscopy tool also includes at least one detector where the preferred detector is a continuous position sensitive detector. The innovative sensing system enables CD-AFM tool configurations where the probe may be twisted about its long axes as to better access vertical and re-entrant surfaces of features, including challenging semiconductor device features with high aspect ratio. The twisted probe may be a twisted cantilever or tip tilted with respect to the cantilever. The innovative sensing system enables measurement of the absolute and relative position and orientation of the probe as the probe interacts with a sample.
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