| 发明名称 |
Apparatus and method for mass flow controller with network access to diagnostics |
| 摘要 |
A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.
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| 申请公布号 |
US2003236592(A1) |
申请公布日期 |
2003.12.25 |
| 申请号 |
US20020178884 |
申请日期 |
2002.06.24 |
| 申请人 |
SHAJII ALI;KOTTENSTETTE NICHOLAS;AMBROSINA JESSE |
发明人 |
SHAJII ALI;KOTTENSTETTE NICHOLAS;AMBROSINA JESSE |
| 分类号 |
G01F1/66;G01F1/684;G01F1/696;G01F1/86;G01F5/00;G01F25/00;G05D7/06;(IPC1-7):G05D7/00 |
主分类号 |
G01F1/66 |
| 代理机构 |
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代理人 |
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