发明名称 |
Methods of testing and manufacturing micro-electrical mechanical mirrors |
摘要 |
The present invention provides a method of testing micro-electrical mechanical mirrors including simultaneously applying a voltage to each of a plurality of such mirrors to tilt each of the plurality to a deflection angle, and simultaneously deflecting a beam from each of the plurality using an interferometer to simultaneously determine an accuracy of the deflection angle of each of the plurality. In addition, a method of manufacturing micro-electrical mechanical mirrors is also disclosed.
|
申请公布号 |
US2003234934(A1) |
申请公布日期 |
2003.12.25 |
申请号 |
US20020176773 |
申请日期 |
2002.06.21 |
申请人 |
AGERE SYSTEMS INC.;LUCENT TECHNOLOGIES, INC. |
发明人 |
CARR CHARLES D.;FAN ZHENCAN;FANG LU;HAHN MICHAEL;YIN XIAOQING |
分类号 |
G01M11/00;G02B26/08;(IPC1-7):G01B9/02 |
主分类号 |
G01M11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|