Laser machining apparatus

摘要

A laser machining apparatus capable of effecting a feedback control of a laser output from an early stage of operation and detecting an abnormality of the laser output quickly and precisely. A laser output command issued from a laser output commanding section is subjected to a feedback control and inputted to a laser pumping power supply for a laser oscillator. An output of a laser power sensor is amplified by an amplifier and compared with an output of a measurement simulating section for estimating the measured value of the laser output. A difference of the measured value and the simulated value of the laser output is inputted to the feedback control section and also to an output abnormality detecting section. A measurement input estimating section calculates an average power which should be outputted in a normal condition of the laser machining based on data of the laser output command. A fist order delay system can be adopted as the measurement simulating section. The laser output abnormality detecting section determines whether or not the difference of the measured value and the simulated value is within an allowable range for the detection of an abnormality of the laser machining.