| 发明名称 |
Apparatus and method for self-calibration of mass flow controller |
| 摘要 |
A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as "standards" and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.
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| 申请公布号 |
US2003234046(A1) |
申请公布日期 |
2003.12.25 |
| 申请号 |
US20020178378 |
申请日期 |
2002.06.24 |
| 申请人 |
SHAJII ALI;KOTTENSTETTE NICHOLAS;AMBROSINA JESSE;SMITH JOHN A. |
发明人 |
SHAJII ALI;KOTTENSTETTE NICHOLAS;AMBROSINA JESSE;SMITH JOHN A. |
| 分类号 |
G01F1/66;G01F1/684;G01F1/696;G01F1/86;G01F5/00;G01F25/00;G05D7/06;(IPC1-7):G05D7/06 |
主分类号 |
G01F1/66 |
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