| 发明名称 |
Measuring force on dies and substrates |
| 摘要 |
Systems and methods of measuring force on dies and substrates are provided. In one system, a force measurement die is substituted for a die to be tested on a substrate.
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| 申请公布号 |
US2003234394(A1) |
申请公布日期 |
2003.12.25 |
| 申请号 |
US20020180856 |
申请日期 |
2002.06.25 |
| 申请人 |
HUSSAIN RAFIQUL;BLOCK RICHARD |
发明人 |
HUSSAIN RAFIQUL;BLOCK RICHARD |
| 分类号 |
G01L5/00;G01R31/28;(IPC1-7):H01L21/66;G01R31/26;H01L21/44;H01L21/48;H01L21/50;H01L23/58 |
主分类号 |
G01L5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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