Semiconductor device with a spiral inductor and magnetic material

摘要

A semiconductor device having an inductor including a planar coil portion forming an opening in the center thereof and a core received in the opening and extending above and below the planar coil portion. A first and a second inter-metal dielectric layer, and the inductor further including a first connecting leg including an electrically conductive material. The first connecting leg is connected to the planar coil portion. The planar coil portion is in the first inter-metal dielectric layer and the first connecting leg is in the second inter-metal dielectric layer. The inductor further includes a second connecting leg connected to the planar coil portion, and an electrically conductive bump connected to the second connecting leg.