| 摘要 |
In a low coherent interference fringe analysis method, a light intensity distribution of interference fringes formed by object light and reference light in a sample is represented by a light intensity distribution function using an envelope function. Subsequently, phase shifting is carried out, so as to measure the light intensity at each shift stage. According to thus measured light intensities at respective shift stages, unknowns of the light intensity distribution function are computed. Then, according to the computed unknowns, a peak position of a curve of the envelope function is determined. According to thus determined peak position, phase information of the sample is determined.
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