Verfahren und Anlage zur Innenbeschichtung einer Behandlungskammer,申请号DE19986015951T-传众专利搜索

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发明名称	Verfahren und Anlage zur Innenbeschichtung einer Behandlungskammer
摘要
申请公布号	DE69815951(T2)	申请公布日期	2003.12.24
申请号	DE19986015951T	申请日期	1998.04.30
申请人	APPLIED MATERIALS, INC.	发明人	ROSSMAN, KENT;TURGUT, SAHIN;M'SAAD, HICHEM;NOWAK, ROMOULD
分类号	C23C14/56;C23C16/44;C23C16/50;H01L21/205;(IPC1-7):C23C16/44	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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