发明名称 |
METHOD FOR PRODUCING A SENSOR OR ACTUATOR ARRANGEMENT, AND CORRESPONDING SENSOR OR ACTUATOR ARRANGEMENT |
摘要 |
The invention relates to a sensor or actuator arrangement in which at least one sensor (S1) or one actuator is provided on or in a chip (C). The aim of the invention is to safely protect both the chip (C) and the electrical contacts thereof from the environment, and also to be able to use the sensor (Sl) or actuator to measure parameters of a liquid or a gas. To this end, the chip (C) comprising the sensor (S1) is covered with a protective coating (A1) and at least one channel (K1) is provided, which is guided at least partially laterally in relation to the surface of the chip (C), towards a sensor (S1) or actuator. Preferably, the channel (K1) extends from one side of the arrangement to the sensor (S1). |
申请公布号 |
WO03068671(A3) |
申请公布日期 |
2003.12.24 |
申请号 |
WO2003EP01222 |
申请日期 |
2003.02.07 |
申请人 |
MICRONAS GMBH;ROGALLA, MARKUS;FREUND, INGO;LEHMANN, MIRKO |
发明人 |
ROGALLA, MARKUS;FREUND, INGO;LEHMANN, MIRKO |
分类号 |
G12B9/04;B81B7/00;G01N35/00;H05K5/00;H05K7/14 |
主分类号 |
G12B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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