发明名称 MATERIAL EVAPORATION CHAMBER WITH DIFFERENTIAL VACUUM PUMPING
摘要 <p>The invention relates to a material evaporation chamber, comprising a vacuum chamber (10) and a first pumping unit (13) for pumping said chamber and material sources. According to the invention, a wall (23), which can provide a total or partial vacuum seal, divides said chamber into a first volume (25) and a second volume (22). Certain material sources (17) with a principal axis (18) are placed in the second volume (22). Said second volume (22) is pumped by a second pumping unit (24). The wall (23) comprises apertures (26) which are each centered on the principal axis (18) of one of the material sources (17). The evaporation chamber further comprises means (27) for blocking or opening each of said apertures (26), said means (27) being controlled individually to protect the material sources (17) having an unused principal axis (18).</p>
申请公布号 WO2003106731(P1) 申请公布日期 2003.12.24
申请号 FR2003001868 申请日期 2003.06.18
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址