Bürstenanordnung zum Reinigen von Halbleiterwafern,申请号DE19951024344-传众专利搜索

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发明名称	Bürstenanordnung zum Reinigen von Halbleiterwafern
摘要
申请公布号	DE19524344(C2)	申请公布日期	2003.12.24
申请号	DE19951024344	申请日期	1995.07.04
申请人	LAM RESEARCH CORP.(N.D.GES.D.STAATES DELAWARE), FREMONT	发明人	THRASHER, DAVID L.;RYLE, LYNN
分类号	B08B1/04;B21B45/06;H01L21/00;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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