发明名称 |
PMOS DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A PMOS device and a method for manufacturing the same are provided to be capable of improving the electrical characteristic of the PMOS device by using a selective epitaxial growth method. CONSTITUTION: A PMOS device is provided with an insulating substrate(101), an oxide layer(102) formed at the upper center portion of the insulating substrate, and a nitride layer(103) formed at the upper portion of the oxide layer. The PMOS device further includes a polysilicon layer(104) formed at the upper portion of the insulating substrate for enclosing the nitride layer enough and a gate stack formed at the upper portion of the polysilicon layer. At this time, the polysilicon layer is formed by carrying out a selective epitaxial growth.
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申请公布号 |
KR20030095595(A) |
申请公布日期 |
2003.12.24 |
申请号 |
KR20020032871 |
申请日期 |
2002.06.12 |
申请人 |
DONGBU ELECTRONICS CO., LTD. |
发明人 |
HAN, SEUNG HO |
分类号 |
H01L29/78;(IPC1-7):H01L29/78 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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