发明名称 PMOS DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A PMOS device and a method for manufacturing the same are provided to be capable of improving the electrical characteristic of the PMOS device by using a selective epitaxial growth method. CONSTITUTION: A PMOS device is provided with an insulating substrate(101), an oxide layer(102) formed at the upper center portion of the insulating substrate, and a nitride layer(103) formed at the upper portion of the oxide layer. The PMOS device further includes a polysilicon layer(104) formed at the upper portion of the insulating substrate for enclosing the nitride layer enough and a gate stack formed at the upper portion of the polysilicon layer. At this time, the polysilicon layer is formed by carrying out a selective epitaxial growth.
申请公布号 KR20030095595(A) 申请公布日期 2003.12.24
申请号 KR20020032871 申请日期 2002.06.12
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 HAN, SEUNG HO
分类号 H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/78
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