| 摘要 |
<p>A micro-mechanical pressure transducer (100) is disclosed in which a capacitive transducer structure is integrated with an inductor coil (105) to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field in the transducer (100). The capacitive transducer structure (100) comprises a conductive movable diaphragm (106), a fixed counter electrode (107), and a predetermined air gap (109) between said diaphragm (106) and electrode (107). The diaphragm (106) deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer (100).</p> |
