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发明名称
HALBLEITER-BILDAUFNAHMEVORRICHTUNG
摘要
申请公布号
DE69819935(D1)
申请公布日期
2003.12.24
申请号
DE19986019935
申请日期
1998.03.06
申请人
SIMAGE OY, ESPOO
发明人
SPARTIOTIS, E.;PYYHTIA, ILARI;CAO, TIELANG
分类号
G01T1/24;H01L27/14;H01L27/146;H04N;H04N5/32;(IPC1-7):G01T1/24
主分类号
G01T1/24
代理机构
代理人
主权项
地址
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