WAFER LOADING ERROR DETECTING APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A wafer loading error detecting apparatus of semiconductor manufacturing equipment is provided to be capable of exactly sensing the distance length between wafers loaded at each slot of a cassette and minimizing the damage of the wafer. CONSTITUTION: A wafer loading failure detecting apparatus of a semiconductor manufacturing equipment is provided with a cassette having a plurality of slots spaced apart from each other, detecting parts(2,4) installed at the cassette for sensing the distance length between wafers, and a controller(6) for generating a driving control signal or an error signal according to the signal sensed from the detecting part. The wafer loading error detecting apparatus further includes a driving part(8) for generating a motor driving signal in response to the driving control signal of the controller and a lift part(12) for moving the cassette up and down by rotating a motor(10) in response to the motor driving signal of the driving part.