SUPPRESSION FEEDTHRU INSULATOR ASSEMBLY STRUCTURE OF SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A suppression feedthru insulator assembly structure of a semiconductor manufacturing apparatus is provided to be capable of replacing an exposed insulating part of a suppression feedthru part for minimizing the contamination of the exposed insulating part. CONSTITUTION: A suppression feedthru insulator assembly structure of a semiconductor manufacturing apparatus is provided with the first insulating part(21) formed at the inner portion of a suppression feedthru part and the second insulating part(31) connected with the first insulating part. At this time, the second insulating part is capable of being detached from the first insulating part. The suppression feedthru insulator assembly structure further includes a contamination preventing part(40) for enclosing the exposed portion of the first insulating part.